Alcatel/Adixen ADS-602P Dry Pump ISO100 Inlet, Rebuilt Image 1
Alcatel/Adixen ADS-602P Dry Pump ISO100 Inlet, Rebuilt Image 2
Alcatel/Adixen ADS-602P Dry Pump ISO100 Inlet, Rebuilt Image 3
Alcatel/Adixen ADS-602P Dry Pump ISO100 Inlet, Rebuilt Small Image 1
Alcatel/Adixen ADS-602P Dry Pump ISO100 Inlet, Rebuilt Small Image 2
Alcatel/Adixen ADS-602P Dry Pump ISO100 Inlet, Rebuilt Small Image 3

Alcatel/Adixen ADS-602P Dry Pump ISO100 Inlet, Rebuilt

$ 18,000.00

  • Type of Product: Dry Pump
  • Manufacturer: Alcatel/Adixen
  • Price: $18,000.00
  • Inlet: ISO100
  • Exhaust: KF40
  • Motor: 230-460/480V, 3P, 50/60Hz
  • *Additional Configurations Available Upon Request
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Technical Specs

Peak Pumping Speed 329 cfm @ 60Hz., 282 cfm @ 50Hz.
Typical Ultimate Pressure (no purge) 3.7X10-4 Torr @ 60Hz., 6X10-4 Torr @ 50Hz.
Max Ultimate Pressure (no purge) 6.7X10-4 Torr @ 60Hz., 1.5X10-3 Torr @ 50Hz.
Weight 243kg/540lbs.
Applications Include Ashing, Stripping, Dielectric, Poly Etch-Implant Source, Medium CVD