Alcatel ATH-1000M Turbo Pump, Rebuilt Image 1

Alcatel ATH-1000M Turbo Pump, Rebuilt

$ 11,330.00

  • Type of Product: Turbo Pump
  • Manufacturer: Alcatel/Adixen
  • Condition: Rebuilt
  • Price: $11,330.00
  • Inlet: ISO200
  • Pumping speed: 850 l/s (N2)
  • Compression ratio: 2 x 10^8 (N2)
  • Ultimate pressure: 6 x 10-9 Torr (without purge)
  • Weight: 62 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Recommended controller ACT-1000M
Recommended forepump ADP-81
Applications semiconductor • plasma etching • ion implantation • sputtering • plasma deposition • electron microscopes • surface analysis • research & development • high energy physics • space simulation • accelerators