Alcatel/Adixen ATH-1600M Turbo Pump, ISO200F Inlet, Rebuilt Image 1
Alcatel/Adixen ATH-1600M Turbo Pump, ISO200F Inlet, Rebuilt Image 2
Alcatel/Adixen ATH-1600M Turbo Pump, ISO200F Inlet, Rebuilt Image 3
Alcatel/Adixen ATH-1600M Turbo Pump, ISO200F Inlet, Rebuilt Small Image 1
Alcatel/Adixen ATH-1600M Turbo Pump, ISO200F Inlet, Rebuilt Small Image 2
Alcatel/Adixen ATH-1600M Turbo Pump, ISO200F Inlet, Rebuilt Small Image 3

Alcatel/Adixen ATH-1600M Turbo Pump, ISO200F Inlet, Rebuilt

$ 18,200.00

  • Type of Product: Turbo Pump
  • Manufacturer: Alcatel/Adixen
  • Price: $18,200.00
  • Condition: Rebuilt
  • Inlet: ISO200F
  • Exhaust: KF40
  • *Additional Configurations Available Upon Request
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Technical Specs

Rotational Speed 39000 rpm
Pumping Speed ISO200F, N2: 1400 l/s, He: 1150 l/s, H2: 750 l/s ISO250F, N2: 1500 l/s, He: 1150 l/s, H2: 750 l/s
Compression Ratio N2: 6X10E+7, He: 8X10E+3, H2: 3X10E+2
Ultimate Pressure 6X10-9 mbar
Recommended Backing Pump ADP/ADS
Recommended Controller Alcatel ACT-1300M
Weight 35.5kg/78.3lbs
Applications Include Metal Etching, Dielectric Etch, Interconnect Etch, PECVD, Ion Implantation, Sputtering, Electron Microscopes, Plasma Disposition, R&D, Particle Accelerators, Space Simulation