Alcatel/Adixen ATH 1600 M Turbo Pump, ISO200F Inlet, Rebuilt Image 1
Alcatel/Adixen ATH 1600 M Turbo Pump, ISO200F Inlet, Rebuilt Image 2
Alcatel/Adixen ATH 1600 M Turbo Pump, ISO200F Inlet, Rebuilt Image 3
Alcatel/Adixen ATH 1600 M Turbo Pump, ISO200F Inlet, Rebuilt Small Image 1
Alcatel/Adixen ATH 1600 M Turbo Pump, ISO200F Inlet, Rebuilt Small Image 2
Alcatel/Adixen ATH 1600 M Turbo Pump, ISO200F Inlet, Rebuilt Small Image 3

Alcatel/Adixen ATH 1600 M Turbo Pump, ISO200F Inlet, Rebuilt

$ 18,200.00

  • Type of Product: Turbo Pump
  • Manufacturer: Alcatel/Adixen
  • Price: $18,200.00
  • Condition: Rebuilt
  • Inlet: ISO200F
  • Exhaust: KF40
  • *Additional Configurations Available Upon Request
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Technical Specs

Compression Ratio > 1 x 10^8 (Ar)
> 5 x 10^2 (H2)
> 4 x 10^3 (He)
> 1 x 10^8 (N2)
Pumping Speed 1,280 l/s (Ar)
540 l/s (H2)
940 l/s (He)
1,360 l/s (N2)
Ultimate Pressure < 4.5 x 10-9 Torr
Weight 75 lbs
Recommended Backing Pump ADP/ADS
Recommended Controller Alcatel ACT-1300M
Applications Metal Etching, Dielectric Etch, Interconnect Etch, PECVD, Ion Implantation, Sputtering, Electron Microscopes, Plasma Disposition, R&D, Particle Accelerators, Space Simulation