Alcatel ATH-2300M Turbo Pump, Rebuilt

$ 21,836.00

  • Type of Product: Turbo Pump
  • Manufacturer: Alcatel/Adixen
  • Condition: Rebuilt
  • Price: $21,836.00
  • Part number: Q66621A1
  • Inlet: ISO250F
  • Exhaust: KF40
  • Pumping speed: 2,100 l/s (N2)
  • Compression ratio: > 10^9 (N2)
  • Ultimate pressure: 3 x 10-9 Torr 
  • Weight: 102 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Recommended controller ACT-2300M
Recommended backing pump ADP • ADS
Applications glass coating • micro machining systems • research & development • electron microscopy • space simulation chambers • particle accelerators • semiconductor processes (etch, CVD, ion implant) • coating & thin films deposition • ion milling • ion beam rectification