Edwards EPX-180L Dry Pump, Rebuilt Image 1

Edwards EPX-180L Dry Pump, Rebuilt

$ 12,875.00

  • Type of Product: Dry Pump
  • Manufacturer: Edwards
  • Condition: Rebuilt
  • Price: $12,875.00
  • Inlet: ISO63
  • Exhaust: KF25
  • Pumping speed: 106 CFM
  • Ultimate vacuum: < 7 x 10-5 Torr
  • Weight: 99 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Applications semiconductor • ash/strip • implant end station applications