Edwards iH-600 Dry Pump, Rebuilt

$ 16,686.00

  • Type of Product: Dry Pump
  • Manufacturer: Edwards
  • Condition: Rebuilt
  • Price: $16,686.00
  • Inlet: ISO100
  • Exhaust: KF40
  • Motor: 3 Phase, 460V, 50/60Hz
  • Pumping speed: 353 CFM (60Hz)
  • Ultimate pressure: 5.3 x 10-4 Torr (60Hz)
  • Weight: 915 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Applications load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • strip/ashing • oxide etch • silicon etch • metal etch • implant source • HPD CVD • RTP • SACVD • MOCVD • PECVD • LPCVD • ALD