Edwards iL-70 Dry Pump, Rebuilt Image 1

Edwards iL-70 Dry Pump, Rebuilt

$ 8,446.00

  • Type of Product: Dry Pump
  • Manufacturer: Edwards
  • Condition: Rebuilt
  • Price: $8,446.00
  • Inlet: ISO63 bolted
  • Exhaust: KF40
  • Pumping speed: 49.4 CFM (60Hz)
  • Ultimate pressure: 2.25 x 10-2 Torr (60Hz)
  • Weight: 507 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Applications semiconductor fabrication processes • load lock • transfer chamber • PVD • SEM