Edwards IPX-100 Dry Pump, Rebuilt

$ 10,300.00

  • Type of Product: Dry Pump
  • Manufacturer: Edwards
  • Condition: Rebuilt
  • Price: $10,300.00
  • Inlet: KF40
  • Exhaust: KF25
  • Pumping speed: 58.9 CFM
  • Ultimate pressure: < 3.7 x 10-3 Torr
  • Weight: 121 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Applications load lock • transfer chamber • PVD sputtering • ashing • stripping • dielectric etch • beam & target implant • clean environments where fan cooling is unacceptable