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Edwards
Edwards IPX-100 Dry Pump, Rebuilt
Edwards IPX-100 Dry Pump, Rebuilt
$ 10,300.00
Type of Product
: Dry Pump
Manufacturer
: Edwards
Condition
: Rebuilt
Price
: $10,300.00
Inlet
: KF40
Exhaust
: KF25
Pumping speed
: 58.9 CFM
Ultimate pressure
: < 3.7 x 10-3 Torr
Weight
: 121 lbs
*Additional Configurations Available Upon Request
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MANUAL
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Technical Specs
Applications
load lock • transfer chamber • PVD sputtering • ashing • stripping • dielectric etch • beam & target implant • clean environments where fan cooling is unacceptable