Edwards IPX-500 Dry Pump, Rebuilt Image 1

Edwards IPX-500 Dry Pump, Rebuilt

$ 11,330.00

  • Type of Product: Dry Pump
  • Manufacturer: Edwards
  • Condition: Rebuilt
  • Price: $11,330.00
  • Inlet: ISO160
  • Exhaust: KF25
  • Pumping speed: 294.3 CFM
  • Ultimate pressure: < 7.5 x 10-7 Torr
  • Weight: 132 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Applications load lock • transfer chamber • PVD sputtering • ashing • stripping • dielectric etch • beam & target implant • clean environments where fan cooling is unacceptable