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Edwards iQDP-80 Dry Pump, Rebuilt

$ 7,674.00

  • Type of Product: Dry Pump
  • Manufacturer: Edwards
  • Condition: Rebuilt
  • Price: $7,674.00
  • Part Number: A53280905
  • Inlet: Edwards 63
  • Exhaust: KF40
  • Motor: 3 Phase, 200-460V, 50/60 Hz
  • *Additional Configurations Available Upon Request
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Technical Specs

Peak Pumping Speed 80m3h-1 @ 50Hz., 96m3h-1 @ 60Hz.
Displacement 91.5m3h-1 @ 50Hz., 109.8m3h-1 @ 60Hz.
Mass 216kg./477lbs.
Applications Include Load Lock, Sputterers, Evaporators, Ion Implanters, Plasma Etch