Edwards IQDP-80 Dry Pump, Edwards 63 Inlet, Rebuilt Image 1
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Edwards IQDP-80 Dry Pump, Edwards 63 Inlet, Rebuilt Small Image 1
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Edwards IQDP-80 Dry Pump, Edwards 63 Inlet, Rebuilt

$ 7,450.00

  • Type of Product: Dry Pump
  • Manufacturer: Edwards
  • Price: $7,450.00
  • Condition: Rebuilt
  • Inlet: Edwards 63
  • Exhaust: KF-40
  • Motor: 200-460V, 3P, 50/60Hz
  • *Additional Configurations Available Upon Request
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Technical Specs

Peak Pumping Speed 80m3h-1 @ 50Hz., 96m3h-1 @ 60Hz.
Displacement 91.5m3h-1 @ 50Hz., 109.8m3h-1 @ 60Hz.
Mass 216kg./477lbs.
Applications Include Load Lock, Sputterers, Evaporators, Ion Implanters, Plasma Etch