Leybold Mag 2000CT Digital Turbo Pump, Rebuilt P/N 400047V0012

$ 29,046.00

  • Type of Product: Turbo Pump
  • Manufacturer: Leybold/Oerlikon
  • Condition: Rebuilt
  • Price: $29,046.00
  • Part Number: 400047V0012
  • Inlet: ISO250K
  • Exhaust: KF40
  • Pumping speed: 1550 l/s-1 (N2)
  • Compression ratio: > 10^8
  • Ultimate pressure: < 0.75 x 10-8 Torr
  • Weight: 150 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Recommended backing pump D-65BCS • dry compressing pump with pumping speed 100 m3/h
Recommended controllers Mag Drive Digital • Mag Drive 2000
Applications load locks • transfer chambers • all major semiconductor processes (etch, CVD, PVD, ion implantation)