Pfeiffer ATH-1300M Turbo Pump, ISO200F Inlet Image 1
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Pfeiffer ATH-1300M Turbo Pump, ISO200F Inlet Small Image 1
Pfeiffer ATH-1300M Turbo Pump, ISO200F Inlet Small Image 2
Pfeiffer ATH-1300M Turbo Pump, ISO200F Inlet Small Image 3
Pfeiffer ATH-1300M Turbo Pump, ISO200F Inlet Small Image 4
Pfeiffer ATH-1300M Turbo Pump, ISO200F Inlet Small Image 5

Pfeiffer ATH-1300M Turbo Pump, ISO200F Inlet

$ 17,500.00

  • Type of Product: Turbo Pump
  • Manufacturer: Pfeiffer
  • Price: $17,500.00
  • Inlet: ISO200F
  • Exhaust: KF40
  • Vent Valve:  KF16 Purge
  • *Additional Configurations Available Upon Request
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Technical Specs

Rotational Speed 34000 rpm
Pumping Speed ISO160F, N2: 920, He: 810, H2: 490 ISO200F, N2: 1250, He: 850, H2: 550
Compression Ratio N2: 1X10E+7, He: 2X10E+3, H2: 1X10E+2
Ultimate Pressure 8X10-9 mbar
Recommended Backing Pump ADP/ADS
Controller Magpower, ACT-1300M
Weight 34kg./75.5lbs.
Applications Include Metal Etching, Dielectric Etch, Interconnect Etch, PECVD, Ion Implantation, Sputtering, Electron Microscopes, Plasma Disposition, R&D, Particle Accelerators, Space Simulation