Nominal Rotation Speed | 90000 l/min |
Volume Flow Rate | N2: 33 l/s, He: 39 l/s, H2: 32 l/s |
Compression Ratio | N2: >10E+11, He: 6X10E+6, H2: >10E+5 |
Final Pressure | With Rotary Vane Pump: <5X10-10, With Diaphragm Pump: <1X10-8 |
Protection Class | IP30 |
Recommended Controller | Pfeiffer DCU-100 |
Recommended Backing Pump | MVP15/UNO5 |
Weight | 2.5kg. |
Applications Include | Semiconductor Processes, Thin Film Coatings, Mass Spectrometry, Process Gas Monitors, R&D, UHV Technology, HV Technology, Vacuum Processing, Accelerators, Fusion |