Pfeiffer TMH-1600C Turbo Pump Image 1

Pfeiffer TMH-1600C Turbo Pump

$ 28,700.00

  • Type of Product: Turbo Pump
  • Manufacturer: Pfeiffer
  • Price: $28,700.00
  • *Additional Configurations Available Upon Request
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Technical Specs

Pumping Speed ISO200/200CF N2: 1100 l/s, He: 1320 l/s, H2: 1050 l/s
Pumping Speed ISO250/250CF N2: 1500 l/s, He: 1450 l/s, H2: 1150 l/s
Compression Ratio N2: >10E+12, He: >1X10E+8, H2: 3X10E+6
Nominal Rotational Speed 36000 1/min
Recommended Backing Pump Diaphragm Pump: MD-4T, Rotary Vane: DUO010M
Recommended Controller Pfeiffer TCP-380/600
Weight 53kg/117lbs.
Applications Include HDP Etching, Plasma RI Etching, HDP-CVD, PVD Sputtering, Ion Implantation, MBE, Thin Film, Vacuum Process, R&D, UHV Applications, Acceleration & Storage Ring Technology