Pfeiffer TMH-521P,  Turbo Pump Image 1
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Pfeiffer TMH-521P,  Turbo Pump Small Image 1
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Pfeiffer TMH-521P, Turbo Pump

$ 13,000.00

  • Type of Product: Turbo Pump
  • Manufacturer: Pfeiffer
  • Price: $13,000.00
  • *Additional Configurations Available Upon Request
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Technical Specs

Nominal Rotation Speed 50000 l/min
Volume Flow Rate ISO100 N2: 290 l/s, He: 400 l/s, H2: 380 l/s, Ar: 260 l/s
Volume Flow Rate ISO160 N2: 510 l/s, He: 520 l/s, H2: 450 l/s, Ar: 500 l/s
Compression Ratio N2: >10E+12, He: 5X10E+7, H2: 6.5X10E+5, Ar: >10E+12
Max Fore Vacuum Pressure N2: 13 mbar, He: 12.5 mbar, H2: 9 mbar, Ar: 11 mbar
Protection Class IP30
Weight 15kg/33.6lbs.
Recommended Backing Pump MD-4T or DUO10
Recommended Controller TPS/DCU300
Applications Include Semiconductor Processes, Thin Film Coatings, Mass Spectrometry, Process Gas Monitors, R&D, UHV Technology, HV Technology, Vacuum Processing, Accelerators, Fusion