Seiko Seiki STP-1003C Turbo Pump Image 1
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Seiko Seiki STP-1003C Turbo Pump Small Image 1
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Seiko Seiki STP-1003C Turbo Pump

$ 23,381.00

  • Type of Product: Turbo Pump
  • Manufacturer: Seiko Seiki
  • Condition: New
  • Price: $23,381.00
  • Part Number: YT39B0130
  • Inlet: ISO200F
  • Exhaust: KF40
  • Vent: KF10
  • Pumping speed: 1,000 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Ultimate pressure: 5 x 10-8 Torr
  • Weight: 69 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Recommended controller SCU-750 • SCU-800
Recommended backing pump E2M28 • E2M30
Applications plasma etch • ECR etch • film deposition • sputtering • ion implantation source • beam line pumping • MBE • diffusion • photo resist stripping • crystal / expitaxial growth • wafer inspection • load lock chambers