Seiko Seiki STP-1003C Turbo Pump, Rebuilt Image 1
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Seiko Seiki STP-1003C Turbo Pump, Rebuilt Small Image 1
Seiko Seiki STP-1003C Turbo Pump, Rebuilt Small Image 2
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Seiko Seiki STP-1003C Turbo Pump, Rebuilt

$ 22,351.00

  • Type of Product: Turbo Pump
  • Manufacturer: Seiko Seiki
  • Condition: Rebuilt
  • Price: $22,351.00
  • Part Number: B721-01-090
  • Inlet: ISO200K
  • Exhaust: KF40
  • Vent Valve: fixed
  • Pumping speed: 1,000 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Ultimate pressure: 5 x 10-8 Torr
  • Weight: 69 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Recommended controller SCU-750 • SCU-800
Recommended backing pump E2M28 • E2M30
Applications plasma etch • ECR etch • film deposition • sputtering • ion implantation source • beam line pumping • MBE • diffusion • photo resist stripping • crystal / expitaxial growth • wafer inspection • load lock chambers