Seiko Seiki STP-301 Turbo Pump, ISO100 Inlet, Factory Rebuilt Image 1
Seiko Seiki STP-301 Turbo Pump, ISO100 Inlet, Factory Rebuilt Image 2
Seiko Seiki STP-301 Turbo Pump, ISO100 Inlet, Factory Rebuilt Image 3
Seiko Seiki STP-301 Turbo Pump, ISO100 Inlet, Factory Rebuilt Small Image 1
Seiko Seiki STP-301 Turbo Pump, ISO100 Inlet, Factory Rebuilt Small Image 2
Seiko Seiki STP-301 Turbo Pump, ISO100 Inlet, Factory Rebuilt Small Image 3

Seiko Seiki STP-301 Turbo Pump, ISO100 Inlet, Factory Rebuilt

$ 10,200.00

  • Type of Product: Turbo Pump
  • Manufacturer: Seiko Seiki
  • Price: $10,200.00
  • Condition: Factory Rebuilt
  • Part Number: B74830020R
  • Inlet: ISO100
  • Exhaust: KF25
  • Vent Valve: -
  • *Additional Configurations Available Upon Request
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Technical Specs

Inlet ISO100
Pumping speed (N2) 300 l/s
Compression ratio (N2) > 10^8
Ultimate pressure 5 x 10-8 Torr
Weight 25 lbs
Applications Plasma Etch for Metal, Tungsten and Dielectric Oxide and Polysilicon, Electron Cyclotron Resonance Etch, Film Deposition, Sputtering, Ion Implantation Source, Beam Line Pumping End Station, MBE, Diffusion, Photo Resist Stripping, Crystal/Epitaxial Growth, Wafer Inspection, Load Lock Chambers, Surface Analysis, Mass Spectrometry, Electron Microscopy, High Energy Physics