Seiko Seiki STP-451 Turbo Pump Image 1

Seiko Seiki STP-451 Turbo Pump

$ 10,000.00

  • Type of Product: Turbo Pump
  • Manufacturer: Seiko Seiki
  • Price: $10,000.00
  • *Additional Configurations Available Upon Request
QUANTITY
Share

Technical Specs

Pumping Speed N2: 480 l/s, He: 460 l/s, H2: 460 l/s
Compression Ratio N2: >10E+8, He: 5X10E+5, H2: 2X10E+4
Ultimate Pressure Without Anti-Corrosion: ICF Flange: 10-10 Torr, VG/ISO Flange: 5X10-8 Torr, Chemical Specific Type: ICF Flange: 10-9 Torr, VG/ISO Flange: 5X10-8 Torr
Rated Speed 25000 to 48000 rpm
Installation Position Free
Cooling Method Natural Air Cooling
Mass 12kg/26.4lbs.
Applications Include Plasma Etch, Electron Cyclotron Resonance, Film Deposition, Sputtering, Ion Implantation, MBE, Diffusion, Photo Resist Stripping, Crystal Growth, Water Inspection, Load-Lock Chambers.