Seiko Seiki STP-451 Turbo Pump

$ 10,506.00

  • Type of Product: Turbo Pump
  • Manufacturer: Seiko Seiki
  • Condition: New
  • Price: $10,506.00
  • Inlet: ISO160
  • Exhaust: KF25
  • Pumping speed: 480 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Weight: 27 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Recommended controller SCU-21
Applications plasma etch • electron cyclotron resonance • film deposition • ion implantation • sputtering • MBE • diffusion • photo resist stripping • crystal growth • water inspection • load-lock chambers