Seiko Seiki STP-600 Turbo Pump, Rebuilt

$ 18,231.00

  • Type of Product: Turbo Pump
  • Manufacturer: Seiko Seiki
  • Condition: Rebuilt
  • Price: $18,231.00
  • Inlet: ISO250
  • Exhaust: KF40
  • Pumping speed: 650 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Ultimate pressure: 7.5 x 10-10 Torr
  • Weight: 66 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Recommended controller SCU-600
Recommended backing pump E2M18
Applications plasma etch • electron cyclotron resonance • film deposition • ion implantation • sputtering • MBE • diffusion • photo resist stripping • crystal growth • water inspection • load-lock chambers