Seiko Seiki STP-603C Turbo Pump Image 1

Seiko Seiki STP-603C Turbo Pump

Pricing and lead time confirmed with inquiry

  • Type of Product: Turbo Pump
  • Manufacturer: Seiko Seiki
  • Condition: New
  • Price: ASK
  • *Additional Configurations Available Upon Request
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Technical Specs

Inlet ISO160K
Pumping speed (N2) 650 l/s
Compression ratio > 10^8
Ultimate pressure 1 x 10-9 Torr
Weight 69 lbs
Applications Plasma Etch for Metal, Tungsten and Dielectric Oxide and Polysilicon, Electron Cyclotron Resonance Etch, Film Deposition, Sputtering, Ion Implantation Source, Beam Line Pumping End Station, MBE, Diffusion, Photo Resist Stripping, Crystal/Epitaxial Growth, Wafer Inspection, Load Lock Chambers, Surface Analysis, Mass Spectrometry, Electron Microscopy, High Energy Physics