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Edwards STP-A1303CV Turbo Pump

$ 25,470.00

  • Type of Product: Turbo Pump
  • Manufacturer: Edwards
  • Condition: New
  • Price: $25,470.00
  • Part Number: YT36B0100
  • Inlet: ISO200F
  • Exhaust: KF40
  • Vent Valve: KF16
  • Pumping speed: 1,300 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Ultimate pressure: 1 x 10-9 Torr
  • Weight: 90 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Recommended controller SCU-800
Applications semiconductor • coating • scientific research & development • LED • metallurgy • solar • flat panel display • plasma etch for metal • ion implantation source • film deposition • diffusion • load lock chambers • surface analysis • mass spectrometry • high energy physics