Seiko Seiki STP-A1303CV3 Turbo Pump Image 1

Seiko Seiki STP-A1303CV3 Turbo Pump

$ 22,500.00

  • Type of Product: Turbo Pump
  • Manufacturer: Seiko Seiki
  • Price: $22,500.00
  • *Additional Configurations Available Upon Request
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Technical Specs

Pumping Speed N2: 1300 l/s, H2: 800 l/s
Compression Ratio N2: >10E+8 l/s, H2: 10E+3 l/s
Ultimate Pressure 10-9 Torr
Rated Speed 32,500 rpm
Installation Position Free
Cooling Method Water Cooling
Recommended Controller Seiko Seiki SCU-A1303
Mass 39kg/86lbs.
Applications Include Plasma Etch, Electron Cyclotron Resonance, Film Deposition, Sputtering, Ion Implantation, MBE, Diffusion, Photo Resist Stripping, Crystal Growth, Water Inspection, Load-Lock Chambers.