Seiko Seiki STP-A1603C Turbo Pump, Factory Rebuilt Image 1
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Seiko Seiki STP-A1603C Turbo Pump, Factory Rebuilt Small Image 1
Seiko Seiki STP-A1603C Turbo Pump, Factory Rebuilt Small Image 2
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Seiko Seiki STP-A1603C Turbo Pump, Factory Rebuilt

$ 20,700.00

  • Type of Product: Turbo Pump
  • Manufacturer: Seiko Seiki
  • Price: $20,700.00
  • Inlet: ISO200F
  • Exhaust: KF40
  • Vent Valve: -
  • *Additional Configurations Available Upon Request
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Technical Specs

Inlet ISO200F
Pimping speed (N2) 1,600 l/s
Compression ratio (N2) > 10^8
Ultimate pressure 1 x 10-9 Torr
Weight 77 lbs
Applications Plasma Etch for Metal, Tungsten and Dielectric Oxide and Polysilicon, Electron Cyclotron Resonance Etch, Film Deposition, Sputtering, Ion Implantation Source, Beam Line Pumping End Station, MBE, Diffusion, Photo Resist Stripping, Crystal/Epitaxial Growth, Wafer Inspection, Load Lock Chambers, Surface Analysis, Mass Spectrometry, Electron Microscopy, High Energy Physics