Edwards STP-A1603C Turbo Pump

$ 21,321.00

  • Type of Product: Turbo Pump
  • Manufacturer: Edwards
  • Condition: New
  • Price: $21,321.00
  • Part Number: B75100050
  • Inlet: ISO200F
  • Exhaust: KF40
  • Pumping speed: 1,600 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Ultimate pressure: 1 x 10-9 Torr
  • Weight: 77 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Recommended controller SCU-750 • SCU-800
Applications semiconductor • plasma etch • ECR etch • film deposition • sputtering • ion implantation source • beam line pumping end station • MBE • diffusion • photo resist stripping • crystal/epitaxial growth • wafer inspection • load lock chambers • surface analysis • mass spectrometry • electron microscopy • high energy physics • radioactive applications