Edwards STP-H1000L Turbo Pump, Rebuilt

$ 26,713.00

  • Type of product: turbo pump
  • Manufacturer: Edwards
  • Condition: rebuilt
  • Price: $26,713.00
  • Inlet: ISO200F
  • Exhaust: KF40
  • Pumping speed: 1,000 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Ultimate pressure: 1 x 10-9 Torr
  • Weight: 71 lbs
  • *Other Configurations Available Upon Request
  • OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
MANUAL
TECHNICAL SHEET

Technical Specs

Recommended backing pump QDP-40
Applications plasma & ECR etch • film deposition • sputtering • ion implantation source • beam line pumping • MBE • diffusion • photo resist stripping • crystal / expitaxial growth • wafer inspection • load lock chambers
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