Edwards STP-H451C Turbo Pump, Rebuilt Image 1

Edwards STP-H451C Turbo Pump, Rebuilt

$ 10,506.00

  • Type of Product: Turbo Pump
  • Manufacturer: Edwards
  • Condition: Rebuilt
  • Price: $10,506.00
  • Inlet: ISO160K
  • Pumping speed: 450 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Ultimate pressure: 1 x 10-9 Torr
  • Weight: 33 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Recommended controller SCU-800
Applications plasma etch • ECR etch • film deposition • sputtering • ion implantation source • beam line pumping end station • MBE • diffusion • photo resist stripping • crystal, epitaxial growth • wafer inspection • load lock chambers • surface analysis • mass spectrometry • electron microscopy • high energy physics • semiconductor