Seiko Seiki STP-iXA4506C Turbo Pump Image 1

Seiko Seiki STP-iXA4506C Turbo Pump

Pricing and lead time confirmed with inquiry

  • Type of Product: Turbo Pump
  • Manufacturer: Seiko Seiki
  • Condition: New
  • Price: ASK
  • *Additional Configurations Available Upon Request
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Technical Specs

Inlet VG300
Pumping speed (N2) 3,800 l/s
Compression ratio (N2) > 108
Ultimate pressure 1 x 10-9 Torr
Input 200-240V, 1700VA (without TMS)
220VA (with TMS)
Weight 240 lbs
Applications Plasma Etch for Metal, Tungsten and Dielectric Oxide and Polysilicon, Electron Cyclotron Resonance Etch, Film Deposition, Sputtering, Ion Implantation Source