Edwards STP-iXR1606 Turbo Pump Image 1

Edwards STP-iXR1606 Turbo Pump

Pricing and lead time confirmed with inquiry

  • Type of Product: Turbo Pump
  • Manufacturer: Edwards
  • Condition: New
  • Price: ASK
  • Inlet: ISO200F
  • Exhaust: KF40
  • Pumping speed: 1,600 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Ultimate pressure: 1 x 10-9 Torr
  • Weight: 106 lbs
  • *Additional Configurations Available Upon Request
Share

Technical Specs

Applications plasma etch • ECR etch • film deposition • sputtering • ion implantation source • beam line pumping end station • MBE • diffusion • photo resist stripping • crystal, epitaxial growth • wafer inspection • load lock chambers • surface analysis • mass spectrometry • electron microscopy • high energy physics • radioactive applications