Agilent Varian TV-551 Turbo Pump- Product Spotlight

Agilent Varian TV-551 Turbo Pump- Product Spotlight

July 26, 2018

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by Katy Manning

Varian TV-551 Turbo Pump- Product Spotlight

Features Include:
Macrotorr Stages

Excellent Reliability

High compression ratio for light gases

High throughput

Standard gas purge port

Installation in any orientation

Ceramic bearings

Common Applications Include:
Semiconductor technology

Industrial Applications

Vacuum Furnaces

PVD

Flat panel processing

Nuclear Research

Technical Specifications:

Pumping Speed: ISO-160K N2: 550 liters/second, He: 600 Liters/second, H2: 510 liters/second ISO-100K N2: 350 liters/second, He: 450 Liters/second, H2: 450 liters/second

Compression Ratio: N2: >1x10+9, He: 1x10+7, H2: 1x10+6

Base Pressure with recommended forepump: 1x10-10 Mbar (1x10-10 Torr)

Rotational Speed: 42,000 RPM

Startup Time: 5 Min

Varian TV-551 turbo pumps are in stock and ready to ship, buy now at: https://www.provac.com/products/varian-v-551-nav-turbo-pumps

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