Dry Pumps Background

Dry Pumps

Oil-free dry vacuum pumps including screw, claw, and roots types. Clean operation ideal for semiconductor, pharma, and contamination-sensitive processes.

Dry Pumps

Dry Pumps

We maintain one of the largest inventories of new and rebuilt ready-to-ship vacuum pumps in the United States, including dry vacuum pumps for industrial, scientific, semiconductor, pharmaceutical, and contamination-sensitive applications.

Dry pumps operate without sealing or lubricating fluids in the pumping chamber. This helps reduce the risk of oil entering the vacuum system or process. Our inventory includes dry screw pumps, dry claw pumps, scroll pumps, dry vane pumps, and multi-stage dry process pumps from established vacuum equipment manufacturers.

We offer new, rebuilt, and refurbished equipment, with availability, specifications, pricing, and warranty coverage varying by model. We can also evaluate, repair, or rebuild many existing dry pumps through our vacuum pump repair service.

Shop Dry Pumps by Manufacturer

Different manufacturers offer dry pump technologies designed for specific pressure ranges, gas loads, process conditions, and installation requirements. Choosing the correct manufacturer and model depends on the equipment already installed in your facility and the demands of your application.

Our dry pump inventory includes equipment from manufacturers serving industrial, laboratory, analytical, semiconductor, food-processing, pharmaceutical, and chemical-processing applications.

Top Brands We Carry

Browse dry pumps from the following manufacturers:

Product availability changes as units are sold, rebuilt, or added to our inventory. Review the individual product page for current condition, technical specifications, pricing, and availability.

Can't Find Your Model? We'll Source It

Not every available dry pump is displayed in our online catalog. We may still be able to locate a particular manufacturer, series, configuration, or discontinued model.

Send us the following information to help us identify or source the correct equipment:

  • Manufacturer

  • Model number

  • Equipment serial number, when available

  • Required pumping speed

  • Required ultimate pressure

  • Inlet and exhaust connection sizes

  • Voltage, phase, and frequency

  • Application or process details

  • Gas or vapor exposure

  • Preferred condition, such as new or rebuilt

  • Photos of the equipment nameplate and connections

We can review your requirements, check our available inventory, discuss suitable alternatives, or determine whether your existing pump can be repaired.

Contact our team or call 831-462-8900 for help finding a dry pump.

New vs. Rebuilt Dry Pumps: Which Is Right for You?

We offer both new and rebuilt dry pumps so you can choose equipment that fits your application, schedule, system configuration, and budget.

A new dry pump may be the better choice when you need:

  • A current-production model

  • A specific factory configuration

  • Equipment for a newly designed vacuum system

  • A particular motor, voltage, inlet, exhaust, or control setup

  • A model that is not available in rebuilt condition

  • New equipment that meets a project or facility purchasing requirement

A rebuilt dry pump may be appropriate when you need:

  • Direct replacement for an existing model

  • A compatible pump for an older vacuum system

  • A discontinued model that remains important to your process

  • Lower-cost alternative to available new equipment

  • An unit that can be shipped sooner than a factory order

  • Equipment restored and evaluated for continued service

The right choice depends on the individual pump. Confirm the condition, the included components, specifications, warranty terms, and expected availability before placing an order.

Our team can help you compare a new pump with available rebuilt options when you request a quote.

How to Choose the Right Dry Pump

A dry pump should be selected according to the complete vacuum system and process, not only by manufacturer or physical size. A pump with the wrong pumping speed, pressure capability, connection, or gas compatibility may not deliver the required performance.

Dry pump technology also matters. Provac’s current dry pump inventory includes several operating designs:

  • Dry screw pumps use two intermeshing screws to compress and move gas through the pump.

  • Dry claw pumps use claw-shaped rotors that rotate without contacting one another or the pump housing.

  • Scroll pumps use fixed and orbiting spiral scrolls to create moving pockets of gas.

  • Dry vane pumps use vanes mounted in a rotor to create compression.

  • Multi-stage dry process pumps use multiple pumping stages to move gas through the system.

Each design offers different pumping speeds, pressure capabilities, maintenance requirements, noise levels, and process tolerances.

Key Specifications to Consider

Review the following specifications before selecting a dry pump:

  • Pumping speed or flow rate: Choose a pump with enough capacity for the system volume, required evacuation time, and expected gas load.

  • Ultimate pressure: Confirm that the pump can reach the lowest pressure required by the process.

  • Inlet size and connection: Match the pump inlet to the chamber, piping, fittings, or existing vacuum equipment.

  • Exhaust connection: Confirm the size and arrangement needed for safe discharge or connection to an exhaust system.

  • Gas compatibility: Identify any corrosive, reactive, condensable, or particulate-heavy gases entering the pump.

  • Motor requirements: Check voltage, phase, frequency, power, and control requirements.

  • Cooling requirements: Determine whether the pump requires air cooling, water cooling, or another cooling configuration.

  • Noise and vibration: Consider the installation environment, especially for laboratories and analytical equipment.

  • Physical size and weight: Confirm that the pump fits the available installation area and can be properly supported.

  • Controller and accessory requirements: Some pumps require specific controls, cables, filters, valves, or monitoring equipment.

  • Equipment condition: Review whether the listed unit is new, rebuilt, refurbished, or available for quotation.

Individual Provac product pages may provide specifications such as pumping speed, ultimate pressure, inlet size, exhaust size, motor configuration, dimensions, weight, and available technical documents.

Additional manuals, sizing resources, contamination forms, warranty documents, and safety information are available in our documentation library.

Typical Applications & Industries

Dry pumps are used when clean vacuum generation or reduced process-oil contamination is important.

Applications listed across our dry pump inventory include:

  • Semiconductor manufacturing

  • Solar panel production

  • Pharmaceutical processing

  • Food packaging

  • Chemical processing

  • Analytical instruments

  • Research and development laboratories

  • Vacuum coating

  • Vacuum drying

  • Degassing

  • Industrial vacuum processing

Scroll pumps are often selected for laboratory, research, and analytical applications where compact construction, lower noise, and clean operation are priorities. Browse our complete scroll pump collection to compare available models.

Dry screw and dry claw pumps are available for demanding industrial and process applications. Some systems may also use blowers and boosters to increase pumping capacity or support a required operating range.

For applications where oil-sealed pumping is acceptable, our vane pump collection provides additional rough-vacuum options.

Dry Pumps Repair & Rebuild Services

We provide repair service for roughing, high-vacuum, and ultra-high-vacuum pumps from major original equipment manufacturers.

Our listed dry pump repair capabilities include:

  • Alcatel and Pfeiffer A, ACP, ADP, and ADS series

  • Busch DS series

  • Ebara A, ESA, and ESR series

  • Edwards DP, QDP, iQDP, iGX, iH, EPX, GV, iF, iL, and IPX series

  • Leybold 25P/B, 50P/B, 100P/B, and SP series

  • Kinney KDP and SDV series

  • Additional dry pump models upon review

Repair requirements depend on the pump model, operating history, contamination exposure, internal wear, and parts availability.

Before shipping equipment to our facility, obtain a return materials authorization number and complete the required contamination data sheet. You can begin the process through our RMA portal.

Turnaround Time & Warranty

Dry pump repair turnaround time varies according to:

  • Manufacturer and model

  • Pump condition

  • Required disassembly and inspection

  • Internal wear or process damage

  • Contamination and cleaning requirements

  • Replacement-part availability

  • Required testing

  • Requested modifications or configuration changes

Contact us with the manufacturer, model, serial number, reported symptoms, and operating conditions so we can explain the evaluation process.

Warranty coverage depends on the product sold, service performed, quotation, and applicable Provac terms. Provac must be contacted when a performance problem is discovered. Equipment returned for a warranty evaluation requires an RMA.

The product should not be disassembled, repaired, or modified by an unauthorized party without Provac’s permission because unauthorized work may affect warranty eligibility.

Review our warranty and return documentation or contact us for the terms that apply to your equipment.

Why Buy Dry Pumps from Provac

We buy, sell, service, source, and ship vacuum pumps and helium leak detectors. Our goal is to maintain extensive ready-to-ship inventory and provide technical support when customers need help identifying the right equipment.

When you purchase a dry pump from us, you receive access to:

  • New and rebuilt dry pump options

  • Equipment from multiple established manufacturers

  • Detailed product specifications on many listings

  • Repair and rebuild support for numerous dry pump series

  • Help identifying replacement and discontinued models

  • Domestic and international shipping capabilities

  • Technical support before and after purchase

  • Access to manuals, forms, and warranty documentation

We can help you compare dry pump technologies, confirm system requirements, locate a replacement model, or arrange an evaluation of your existing equipment.

30+ Years of Vacuum Expertise

We have served the vacuum equipment industry since 1990. Provac Sales buys, sells, and services vacuum pumps and helium leak detectors, and we have maintained representative and distributor relationships with MD-Kinney and Inland Vacuum since our inception.

Our experience includes new equipment, rebuilt pumps, discontinued models, specialized configurations, and repair evaluations for a wide range of industrial and scientific vacuum systems.

Whether you know the exact model you need or only have a nameplate photo and application details, our team can help determine the next step.

Fast Shipping Across the U.S.

We ship vacuum equipment throughout the United States and internationally using small-package, courier, and freight services.

Our shipping capabilities include:

  • Ground shipping

  • International shipping

  • Same-day shipments when available

  • Courier shipments

  • Expedited shipping

  • Palletization

  • Shrink wrapping

  • Banding

  • Custom crating

  • Vacuum bagging

We prepare shipments according to the equipment’s weight, value, dimensions, and protection requirements. Products are properly bagged, and new shipping boxes and packaging materials are used.

Shipping method and timing depend on the equipment, destination, carrier, packaging requirements, and order schedule. Contact us directly when you have an urgent shipping requirement.

Frequently Asked Questions About Dry Pumps

What is a dry pump?

A dry pump is a vacuum pump that operates without sealing or lubricating fluids in the pumping chamber. This design helps reduce the risk of oil entering the vacuum system or process.

Dry pump technologies include dry screw, dry claw, scroll, dry vane, and multi-stage dry process designs. The best type depends on the required pumping speed, ultimate pressure, gas compatibility, noise level, and application.

How long do rebuilt dry pumps last?

The service life of a rebuilt dry pump depends on the model, process conditions, operating schedule, gas exposure, contamination level, installation, and maintenance.

Regular inspections, performance monitoring, filter maintenance, proper cooling, and following the manufacturer’s service recommendations can help reduce preventable wear. Contact us when you notice changes in noise, vibration, leakage, temperature, or vacuum performance.

Do you offer a warranty?

Yes. Warranty coverage is available for qualifying products and repair services. The specific terms depend on the equipment, condition, quotation, and service performed.

Contact us to confirm the warranty provided with a particular dry pump. Warranty evaluations require communication with Provac and an RMA before equipment is returned.

What brands do you carry?

Our dry pump inventory includes equipment from Agilent, Alcatel/Adixen, Busch, Ebara, Edwards, Leybold, MD-Kinney, Pfeiffer, and other manufacturers represented in our online catalog.

Available brands, models, conditions, and configurations change as equipment is added or sold.

Request a Quote on Dry Pumps

Need help choosing a dry pump or replacing an existing unit? Send us the manufacturer, model number, required pumping speed, ultimate pressure, inlet size, motor requirements, application details, and preferred equipment condition.

We can review available inventory, help locate a specific model, compare new and rebuilt options, or arrange a repair evaluation.

Request a Quote on Dry Pumps or call 831-462-8900.