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Pfeiffer
Pfeiffer A604H Multi-Stage Dry Process Pump
Pfeiffer A604H Multi-Stage Dry Process Pump
Pricing and lead time confirmed with inquiry
Type of Product
: dry pump
Manufacturer
: Pfeiffer
Condition
: new
Price
: ASK
Inlet
: ISO100
Exhaust
: KF40
Motor
: 3 Phase, 200-230/400-415/460-480V, 50/60Hz
Pumping speed
: 329.6 CFM (N2)
Ultimate pressure
: 1.5 x 10-3 Torr (no purge)
Weight
: 816 lbs
*Additional Configurations Available Upon Request
PROCEED WITH ORDER
MANUAL
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Technical Specs
Applications
semiconductor • etching • PECVD • SACVD • ALD • coating • LED • photovoltaics