Pfeiffer A604H Multi-Stage Dry Process Pump

Pricing and lead time confirmed with inquiry

  • Type of Product: dry pump
  • Manufacturer: Pfeiffer
  • Condition: new
  • Price: ASK
  • Inlet: ISO100
  • Exhaust: KF40
  • Motor: 3 Phase, 200-230/400-415/460-480V, 50/60Hz
  • Pumping speed: 329.6 CFM (N2)
  • Ultimate pressure: 1.5 x 10-3 Torr (no purge)
  • Weight: 816 lbs
  • *Additional Configurations Available Upon Request

Technical Specs

Applications semiconductor • etching • PECVD • SACVD • ALD • coating • LED • photovoltaics
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