Pfeiffer A204H Multi-Stage Dry Process Pump

Pricing and lead time confirmed with inquiry

  • Type of product: dry pump
  • Manufacturer: Pfeiffer
  • Condition: new
  • Price: ASK
  • Inlet: KF50
  • Exhaust: KF40
  • Motor: 3 Phase, 200-230/380-480V, 50/60Hz
  • Pumping speed: 94.17 CFM (N2)
  • Ultimate pressure: 3.75 x 10-2 Torr (no purge)
  • Weight: 573 lbs
  • *Other Configurations Available Upon Request
  • OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact

Technical Specs

Applications semiconductor • etching • PECVD • SACVD • ALD • coating • LED • photovoltaics
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