Pfeiffer ATH-1300MT Turbo Pump- Product Spotlight
Hybrid magnetically-levitated turbo pumps.
5 active axes and the monolithic rotor enhance the robustness and reliability of the pumps. Magnetic levitated bearing allows the rotor tho rotate without any contact, wear, lubrication, noise, or vibration.
Designed for high pressure and high throughput pumping requirements of the semiconductor applications.
Applications Include: Metal Etch, Dielectric Etch, Interconnect Etch, PECVD, Ion Implantation, Sputtering, Electron Microscopy, Plasma Deposition, Research & Development, Particle Accelerators, Space Simulation
Rotational Speed: 34,000 RPM
Pumping Speed: 1,250 liters/second (N2), 850 liters/second (He), 550 liters/second (H2)
Compression Ratio: 1x107 (N2), 2x103 (He), 1x102 (H2)
Ultimate Pressure: 8x10-9 mbar
Purging Nitrogen Flow Rate: 50 SCCM
Mounting Position: Any
Pump Weight: 75.5 Lbs
Buy now at Provac Sales, Inc. https://www.provac.com/products/pfeiffer-ath-1300m-turbo-pump-iso200f-inlet-rebuilt