Pfeiffer's HiPace series are a compact, powerful series which can be run in any orientation. The improved rotor design makes for higher pumping speeds, high backing pump compatibility, and higher gas throughputs coupled with very good compression for light gasses.
Features include:
Integrated drive which produces a shorter run-up time, permanent magnetic bearing, on-site bearing change, sealing gas connection which safeguards bearings against particulate and oxidizing gases
Applications Include: Electron Microscopy, Mass Spectrometry, Leak Detection, PVD Coating, Implantation, Bonding, Photovoltaics, Medical, Lamp/Tube manufacturing, Nuclear Research, Plasma Research, Nano Technology, Biotechnology & More
Pumping Speed (ISO-100K Inlet):
260 liters/second (N2)
255 liters/second (He)
220 liters/second (H2)
255 liters/second (Ar)
Compression ratio (ISO-100K Inlet)
>10E11 (N2)
>10E8 (He)
9x10E5 (H2)
>10E11 (Ar)
Maximum backing pressure (N2) 20 mBar
Buy now:
Pfeiffer HiPace 300 W/ TC-400 https://www.provac.com/products/pfeiffer-hipace-300-turbo-pump
Pfeiffer HiPace 300 W/ TC-110 https://www.provac.com/products/pfeiffer-hipace-300-with-tc110-turbo-pump-iso100k-inlet-rebuilt
