Edwards Vacuum Pumps & Equipment

At Provac Sales, Inc., we supply new, rebuilt, factory-rebuilt, and surplus-new Edwards vacuum pumps and equipment for industrial, scientific, analytical, and semiconductor applications.

Our Edwards inventory includes rotary vane pumps, dry pumps, scroll pumps, turbo pumps, turbo pump controllers, blowers, boosters, helium leak detectors, piston pumps, pumping stations, oil filtration equipment, and selected components and accessories.

Availability and condition vary by product. Some Edwards models are listed with current pricing, while others require a quote. We can also evaluate your existing equipment for professional vacuum pump repair or rebuilding at our facility in Soquel, California.

About Edwards

Edwards Vacuum traces its history to 1919, when F.D. Edwards established the Edwards Engineering Company in South London, United Kingdom. The company later expanded its work in vacuum technology and developed equipment for a broad range of industrial and scientific processes.

Today, Edwards vacuum equipment is used in applications that require rough, high, and ultra-high vacuum conditions. The Edwards products represented in our catalog support applications such as:

• Semiconductor manufacturing

• Research laboratories

• Analytical instrumentation

• Pharmaceutical production

• Vacuum deposition

• Process equipment

• Leak detection

• High-vacuum systems

• General industrial vacuum applications

We carry Edwards equipment across multiple pressure ranges and pumping technologies. This allows us to help customers find replacements for existing systems, source older models, compare equipment configurations, or identify an appropriate pump for a new application.

Popular Edwards Models We Stock

Our online Edwards inventory includes current and older product series in new, rebuilt, factory-rebuilt, and other listed conditions. Inventory changes regularly, so contact us to confirm availability before ordering.

Popular Edwards model families represented in our catalog include:

• E1M, E2M, and RV rotary vane pumps

• DP, EPX, GV, iGX, iH, QDP, and iQDP dry pumps

• XDS and nXDS scroll pumps

• EXT and nEXT turbo pumps

• STP turbo pumps

• TIC and EXC turbo pump controllers

• EH blowers

• QMB boosters

• Spectron and ELD helium leak detectors

• 412J and 612J piston pumps

• RV, nEXT Turbocart, and T-Station pumping stations

Individual listings may include specifications such as pumping speed, ultimate pressure, inlet size, motor configuration, voltage, phase, dimensions, weight, condition, and warranty information.

Edwards Product Lines We Carry

Our Edwards collection includes equipment for roughing, high-vacuum, and system-support applications.

Edwards Rotary Vane Pumps

Our Edwards rotary vane pump inventory includes models from the E1M, E2M, and RV product families.

Examples listed in our catalog include:

• E2M0.7

• E2M1

• E2M1.5

• E2M2

• E2M5

• E2M8

• E2M12

• E1M18FX

• E2M18

• RV3

• RV5

• RV8

• RV12

These oil-sealed pumps are available in different pumping capacities, motor configurations, inlet sizes, and product conditions. Confirm the electrical and connection requirements before selecting a replacement pump.

Edwards Dry Pumps

Our Edwards dry pump collection includes equipment from several established Edwards product series.

Available listings may include:

• DP-40 and DP-80

• EPX-180 and EPX-500 models

• GV-80

• iGX series

• iH series

• QDP series

• iQDP systems

• iF, iL, and IPX series

• Edwards dry pump package systems

Dry pumps are commonly selected when a process requires oil-free operation in the pumping chamber. The correct model depends on the required vacuum level, gas load, process compatibility, cooling arrangement, power requirements, and contamination conditions.

Edwards Scroll Pumps

Our Edwards scroll pump inventory includes XDS and nXDS models for clean, dry pumping applications.

Catalog listings include models such as:

• nXDS-6i

• nXDS-10i

• nXDS-15i

• nXDS-20i

• XDS-5

• XDS-10

• XDS-35i

• XDS-46i

• XDS-100B

Some models are also listed in C and R configurations. Check the complete product description to confirm the configuration, condition, voltage, inlet connection, and other specifications.

Edwards Turbo Pumps

Our Edwards turbo pump collection includes EXT, nEXT, and Edwards/Seiko Seiki STP models.

Examples include:

• EXT-70 and EXT-70H

• EXT-75DX

• EXT-200 split-flow configurations

• EXT-250, EXT-250H, and EXT-250Hi

• nEXT-85D

• nEXT-240D

• STP series turbo pumps

Turbo pumps must be matched with the correct controller, cable, inlet connection, backing pump, cooling arrangement, and system operating conditions.

Edwards Turbo Pump Controllers

We carry Edwards turbo pump controllers for supported turbo pump systems.

Listings include models such as:

• TIC-100W

• TIC-200W

• EXC-100L

• EXC-100E

• EXC-120

• EXC-300

• EXDC drive modules

Controller compatibility is model-specific. Send us the turbo pump model, controller model, cable information, and system details before ordering a replacement.

Edwards Blowers and Boosters

Our Edwards blower and booster inventory includes EH and QMB series equipment.

Examples include:

• EH-250

• EH-500

• EH-1200

• EH-2600

• QMB-250

• QMB-1200

Some rebuilt listings are offered in hydrocarbon-oil and PFPE configurations. The correct configuration depends on the process, backing pump, fluid requirements, system design, and operating environment.

Edwards Helium Leak Detectors

Our Edwards helium leak detector collection includes Spectron and ELD models.

Listings may include:

• Spectron 600

• Spectron 600D

• ELD500 Wet

• ELD500 Dry

• ELD500 Flex

We also provide repair service for supported Edwards Spectron helium leak detectors.

Edwards Piston Pumps and Pumping Stations

Our Edwards catalog includes piston pumps such as the Edwards 412J and 612J, along with Edwards pumping stations.

Pumping station listings include equipment such as:

• RV-5 pumping stations

• nEXT Turbocart pumping stations

• T-Station 85H wet pumping stations

• T-Station 85H dry pumping stations

• Multistage pumping systems

Because pumping stations combine several components, confirm the turbo pump, backing pump, controller, gauges, inlet configuration, and power requirements before ordering.

Need Help Identifying Your Model?

The model number is usually found on the equipment nameplate or identification label. Depending on the equipment type, the label may also show the serial number, voltage, phase, frequency, motor rating, pumping speed, and inlet information.

Send us:

• The complete model number

• The serial number, when available

• A clear photo of the equipment nameplate

• Photos of the inlet and exhaust connections

• The controller or drive model

• The required voltage and phase

• Your application and target vacuum level

• Any symptoms or performance problems

This information helps us determine whether we have a matching unit, a suitable configuration, or an available repair option.

Contact our team or call 831-462-8900 for assistance.

Edwards Repair and Rebuild Services

We provide vacuum pump repair and rebuild services for supported Edwards roughing pumps, high-vacuum pumps, ultra-high-vacuum equipment, controllers, and helium leak detectors.

Our published repair capabilities include Edwards equipment from the following categories and series:

• Blowers and boosters: EH and QMB series

• Diffusion pumps: Diffstak series

• Dry pumps: DP, QDP, iQDP, iGX, iH, EPX, GV, iF, iL, and IPX series

• Helium leak detectors: Spectron series

• Oil filtration systems: MF series

• Piston pumps: 148, 149, 212, and 412 series

• Scroll pumps: ESDP and GVSP series

• Turbo pump controllers: EXC and TIC series

• Turbo pumps: EXT and Edwards/Seiko Seiki STP series

• Rotary vane pumps: EM and RV series

The repair page lists these as supported series, but our capabilities are not necessarily limited to this list. Contact us with your complete Edwards model number so we can review the unit.

Rebuild Process and Turnaround

The exact rebuild process depends on the equipment type, internal condition, contamination level, failure mode, and required replacement components.

A professional vacuum pump rebuild may include:

• Equipment inspection and evaluation

• Complete or partial disassembly

• Cleaning of reusable components

• Replacement of worn seals and gaskets

• Bearing replacement when required

• Replacement of other worn internal components

• Reassembly

• Operational testing

• Vacuum performance testing

For turbo pumps, our published rebuild service may include cleaning, bearing and O-ring replacement, balancing, and helium leak checking. Additional work may be required when a pump has extensive contamination or hard-part damage.

Before shipping equipment to us, create an RMA request and complete the required contamination data sheet. Place the RMA number on the shipping label or associated shipping documents.

Turnaround depends on the equipment, required service, condition, contamination, and availability of necessary components. We will review the information provided and discuss the applicable repair requirements with you.

Warranty Coverage

Warranty coverage depends on the equipment, condition, service, and terms included with the sale or quotation. Contact us to confirm the coverage that applies to a specific Edwards product or rebuild.

Provac must be contacted when a possible warranty issue is discovered. Do not disassemble, repair, or modify the equipment without our permission, as unauthorized work may affect warranty eligibility.

An RMA is required before returning equipment for warranty evaluation. We may first help determine whether an operating issue, installation problem, or another system condition is affecting performance.

Our documentation page provides access to the Provac Warranty and Return Policy, contamination data sheet, shipping directions, and other supporting documents.

New vs. Rebuilt Edwards Pumps

We offer Edwards equipment in several listed conditions, including new, rebuilt, factory-rebuilt, surplus-new, and other product-specific conditions.

The right option depends on:

• Your required model and configuration

• Equipment availability

• Budget

• Required delivery schedule

• Application requirements

• Compatibility with your existing system

• Warranty terms

• Whether the model is still in production

• The condition of your current equipment

Always review the individual product listing and quotation for the exact condition, specifications, included components, and warranty coverage.

When to Buy New vs. Rebuilt

New Edwards equipment may be appropriate when you need:

• A current-production model

• A specific new equipment configuration

• Equipment for a newly designed system

• A model that is not available in rebuilt condition

• Particular manufacturer-supplied options or accessories

A rebuilt Edwards pump may be appropriate when:

• You need a direct replacement for an existing model

• You want to keep an established system configuration

• A rebuilt unit is available sooner

• The original model is older or no longer commonly available

• Replacing the complete vacuum system is unnecessary

• A rebuilt option fits the project budget and operating requirements

A rebuilt unit must still meet the specifications required by your process. Compare pumping speed, ultimate pressure, inlet size, motor requirements, fluid configuration, cooling, controller compatibility, and product condition before ordering.

Can't Find a Specific Part?

Our online catalog does not display every Edwards component, accessory, or available item. Some products shown as out of stock may also be available by request.

Send us:

• The Edwards pump or equipment model

• The part number

• The component description

• The equipment serial number

• A photo of the part

• The quantity needed

• Any required dimensions or specifications

We will check our available inventory and sourcing options. When the exact Edwards item is unavailable, we may also help you review another equipment option from our complete vacuum equipment inventory.

You can also compare equipment from manufacturers such as Leybold, Pfeiffer, or Agilent when a different brand or system configuration is being considered.

Frequently Asked Questions About Edwards Vacuum Equipment

Are Edwards parts still available?

Availability depends on the model, part number, equipment age, and the specific component required. We list selected Edwards components and accessories online, including controllers, drive modules, filters, pumps, and complete systems.

Send us the Edwards model, serial number, and part number so we can check current inventory or sourcing options. Availability cannot be confirmed until we review the exact item requested.

Do you service older Edwards models?

Yes, we service many older Edwards vacuum pumps and related products. Our published repair capabilities include older EM and RV vane pumps, DP and QDP dry pumps, Diffstak diffusion pumps, Spectron leak detectors, EXC controllers, EXT turbo pumps, EH and QMB boosters, and several Edwards piston-pump series.

Because serviceability depends on the unit’s condition and required components, contact us with the complete model number before shipping it.

What warranty is included?

Warranty terms vary by product, condition, repair service, and quotation. Contact us to confirm the warranty coverage included with the Edwards equipment you are considering.

Provac must authorize warranty evaluations and issue an RMA before equipment is returned. Unauthorized disassembly, repair, or modification may affect warranty coverage.

How fast can you ship?

We ship domestically and internationally through small-package and freight carriers. Our shipping capabilities include ground, expedited, courier, international, and same-day shipments when available.

Shipping timing depends on product availability, payment, packaging requirements, equipment size, destination, carrier service, and order timing. Large or sensitive equipment may require palletization, custom crating, banding, shrink wrapping, or vacuum bagging before shipment.

Contact us to confirm whether an Edwards product is ready to ship and which delivery options are available.

Request a Quote on Edwards Equipment

Need an Edwards vacuum pump, controller, helium leak detector, pumping station, replacement component, or repair evaluation?

Send us the model number, required condition, voltage, phase, inlet size, target vacuum level, application details, and requested delivery date. We will review our inventory and help identify the appropriate next step.

Get a Quote on Edwards Equipment

Or call us at 831-462-8900.