Alcatel/Adixen

Alcatel 2021C2 Rotary Vane Pump, Rebuilt

$ 2,678.00

  • Type of product: vane pump
  • Manufacturer: Alcatel/Adixen
  • Condition: rebuilt
  • Price: $2,678.00
  • Inlet: KF25
  • Exhaust: KF25
  • Motor: 1 Phase, 115V, 50/60Hz
  • Oil: PFPE
  • Pumping speed: 14.6 CFM (60Hz)
  • Ultimate pressure: 2.25 x 10-3 Torr (gas ballast closed)
  • Weight: 62 lbs
  • *Additional Configurations Available Upon Request

Technical Specs

Applications plasma/dry etching • reactive sputtering • ion implantation • PECVD • freeze drying • CVD • LPCVD • load lock • oxygen pumping
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