Alcatel/Adixen

Alcatel 2063C2 Rotary Vane Pump, Rebuilt, PFPE

$ 4,410.00

  • Type of product: vane pump
  • Manufacturer: Alcatel/Adixen
  • Condition: rebuilt
  • Price: $4,410.00
  • Inlet: KF40
  • Exhaust: KF40
  • Motor: 3 Phase, 230/460V, 60Hz
  • Oil: PFPE
  • Pumping speed: 42.4 CFM (60Hz)
  • Ultimate pressure: 2.25 x 10-3 Torr (gas ballast closed)
  • Weight: 216 lbs
  • *Other Configurations Available Upon Request
  • OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
MANUAL
TECHNICAL SHEET

Technical Specs

Applications plasma/dry etching • reactive sputtering • ion implantation • PECVD • freeze drying • CVD • LPCVD • load lock • oxygen pumping
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