Alcatel/Adixen
Alcatel 5402CP Turbo Pump, Rebuilt
$ 5,250.00
- Type of product: turbo pump
- Manufacturer: Alcatel/Adixen
- Condition: rebuilt
- Price: $5,250.00
- Inlet: ISO160
- Exhaust: KF40
- Pumping speed: 380 l/s (N2)
- Weight: 19 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Recommended controller | CFF-450 |
| Recommended backing pump | 2063CP+ |
| Applications | reactive ion etching • plasma etch • reactive ion beam etching • low temperature oxides • electron cyclotron resonance processes • plasma enhanced CVD • corrosive gas processes • semiconductor • dry chemistry |
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