Alcatel 5402CP Turbo Pump, Rebuilt

$ 5,250.00

  • Type of Product: turbo pump
  • Manufacturer: Alcatel/Adixen
  • Condition: rebuilt
  • Price: $5,250.00
  • Inlet: ISO160
  • Exhaust: KF40
  • Pumping speed: 380 l/s (N2)
  • Weight: 19 lbs
  • *Additional Configurations Available Upon Request
QUANTITY
Share

Technical Specs

Recommended controller CFF-450
Recommended backing pump 2063CP+
Applications reactive ion etching • plasma etch • reactive ion beam etching • low temperature oxides • electron cyclotron resonance processes • plasma enhanced CVD • corrosive gas processes • semiconductor • dry chemistry