Alcatel/Adixen

Alcatel ADP-122P Dry Pump, Rebuilt

$ 19,143.00

  • Type of Product: dry pump
  • Manufacturer: Alcatel/Adixen
  • Condition: rebuilt
  • Price: $19,143.00
  • Inlet: KF50
  • Exhaust: KF40
  • Motor: 3 Phase, 208V, 50/60Hz, water cooled
  • Pumping speed: 65.8 CFM (60Hz)
  • Ultimate pressure: 6.7 mTorr (60Hz, no N2 purge)
  • Weight: 540 lbs
  • *Additional Configurations Available Upon Request

Technical Specs

Applications load lock • transfer chamber • sputtering • semiconductor • ashing • stripping • dielectric, poly etch • implant source • light/medium applications
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