Alcatel ADP-81 Dry Pump

$ 11,330.00

  • Type of Product: dry pump
  • Manufacturer: Alcatel/Adixen
  • Condition: new
  • Price: $11,330.00
  • Pumping speed: 47 CFM (60Hz)
  • Ultimate pressure: 6.7 x 10-3 Torr (60Hz)
  • Weight: 529 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Applications semiconductor processes • stripping • etching • PECVD • LPCVD • MOCVD • epitaxy • scientific research • clean/corrosive processes