Alcatel ADS-501 Dry Pump Image 1

Alcatel ADS-501 Dry Pump

Pricing and lead time confirmed with inquiry

  • Type of Product: Dry Pump
  • Manufacturer: Alcatel/Adixen
  • Condition: New
  • Price: ASK
  • Inlet: ISO100
  • Exhaust: KF40
  • Pumping speed: 300 CFM (60Hz)
  • Ultimate pressure: 6 x 10-4 Torr (60Hz)
  • Weight: 844 lbs
  • *Additional Configurations Available Upon Request
Share

Technical Specs

Applications semiconductor processes • stripping • etching • PECVD • LPCVD • MOCVD • epitaxy • scientific research • clean/corrosive processes