Alcatel ADS-602P Dry Pump, Rebuilt

$ 18,746.00

  • Type of Product: dry pump
  • Manufacturer: Alcatel/Adixen
  • Condition: rebuilt
  • Price: $18,746.00
  • Inlet: ISO100
  • Exhaust: KF40
  • Motor: 3 Phase, 230-460/480V, 50/60Hz
  • Pumping speed: 329 CFM (60Hz)
  • Ultimate pressure: 3.7 x 10-4 Torr (60Hz)
  • Weight: 804 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Applications ashing • stripping • dielectric • poly etch-implant source • medium CVD