Alcatel/Adixen

Alcatel ATH-400M Turbo Pump, Rebuilt

$ 13,194.00

  • Type of product: turbo pump
  • Manufacturer: Alcatel/Adixen
  • Condition: rebuilt
  • Price: $13,194.00
  • Inlet: ISO100
  • Exhaust: KF40
  • Pumping speed: 320 l/s (N2)
  • Compression ratio: 1 x 10^7 (N2)
  • Ultimate pressure: 6 x 10-9 Torr
  • Weight: 42 lbs
  • *Additional Configurations Available Upon Request

Technical Specs

Recommended backing pump ADP-31
Recommended controller ACT-600M
Applications glass coating • micro machining systems • research & development • electron microscopy • space simulation chambers • particle accelerators • semiconductor processes (etch, CVD, ion implant) • coating & thin films deposition • ion milling • ion beam rectification
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