Alcatel/Adixen ATH-400M Turbo Pump, ISO100 Inlet, Rebuilt Image 1
Alcatel/Adixen ATH-400M Turbo Pump, ISO100 Inlet, Rebuilt Image 2
Alcatel/Adixen ATH-400M Turbo Pump, ISO100 Inlet, Rebuilt Image 3
Alcatel/Adixen ATH-400M Turbo Pump, ISO100 Inlet, Rebuilt Small Image 1
Alcatel/Adixen ATH-400M Turbo Pump, ISO100 Inlet, Rebuilt Small Image 2
Alcatel/Adixen ATH-400M Turbo Pump, ISO100 Inlet, Rebuilt Small Image 3

Alcatel/Adixen ATH-400M Turbo Pump, ISO100 Inlet, Rebuilt

$ 12,000.00

  • Type of Product: Turbo Pump
  • Manufacturer: Alcatel/Adixen
  • Price: $12,000.00
  • Condition: Rebuilt
  • Part Number: -
  • Inlet: ISO100
  • Exhaust: KF40
  • Vent Valve: -
  • *Additional Configurations Available Upon Request
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Technical Specs

Rotational Speed 39000 rpm
Pumping Speed ISO100K N2: 320 l/s, He: 290 l/s, H2: 180 l/s
Pumping Speed ISO160K N2: 410 l/s, He: 360 l/s, H2: 230 l/s
Compression Ratio N2: 1X10E+8, He: 2X10E+3, H2: 1X10E+2
Ultimate Pressure Without Purge 8X10-9 mbar
Recommended Backing Pump ADP31
Recommended Controller ACT-600M
Weight 19kg/41.8lbs.
Applications Include Metal Etching, Dielectric Etch, Interconnect Etch, PECVD, Ion Implantation, Sputtering, Electron Microscopes, Plasma Disposition, R&D, Particle Accelerators, Space Simulation