Alcatel/Adixen
Alcatel ATH-1000M Turbo Pump, Rebuilt
$ 11,897.00
- Type of product: turbo pump
- Manufacturer: Alcatel/Adixen
- Condition: rebuilt
- Price: $11,897.00
- Inlet: ISO200
- Pumping speed: 850 l/s (N2)
- Compression ratio: 2 x 10^8 (N2)
- Ultimate pressure: 6 x 10-9 Torr (without purge)
- Weight: 62 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Recommended controller | ACT-1000M |
| Recommended forepump | ADP-81 |
| Applications | semiconductor • plasma etching • ion implantation • sputtering • plasma deposition • electron microscopes • surface analysis • research & development • high energy physics • space simulation • accelerators |
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