Alcatel
Alcatel ATH-2300MT Turbo Pump, Factory Rebuilt
Pricing and lead time confirmed with inquiry
- Type of product: turbo pump
- Manufacturer: Alcatel
- Condition: factory rebuilt
- Price: ASK
- Part number: Q66621A1
- Inlet: ISO250F
- Exhaust: KF40
- Pumping speed: 2,100 l/s (N2)
- Compression ratio: > 10^9 (N2)
- Ultimate pressure: 3 x 10-9 Torr
- Weight: 102 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Recommended controller | ACT-2300M |
| Recommended backing pump | ADP • ADS |
| Applications | glass coating • micro machining systems • research & development • electron microscopy • space simulation chambers • particle accelerators • semiconductor processes (etch, CVD, ion implant) • coating & thin films deposition • ion milling • ion beam rectification |
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