Ebara 40X20 Dry Pump, Rebuilt

$ 10,300.00

  • Type of Product: dry pump
  • Manufacturer: Ebara
  • Condition: rebuilt
  • Price: $10,300.00
  • Inlet: KF40
  • Pumping speed: 42 CFM (60Hz)
  • Ultimate pressure: 3 x 10-2 Torr (60Hz)
  • Weight: 440 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Applications semiconductor • metal etching • ashing • PECVD • LPCVD