Ebara 80X25 Dry Pump, Rebuilt

$ 12,566.00

  • Type of Product: dry pump
  • Manufacturer: Ebara
  • Condition: rebuilt
  • Price: $12,566.00
  • Inlet: ISO80
  • Exhaust: KF40
  • Pumping speed: 297 CFM (60Hz)
  • Ultimate pressure: 3 x 10-3 Torr
  • Weight: 990 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Applications semiconductor • metal etching • ashing • PECVD • LPCVD