Ebara ESR80WN Dry Pump

Pricing and lead time confirmed with inquiry

  • Type of Product: dry pump
  • Manufacturer: Ebara
  • Condition: new
  • Price: ASK
  • Inlet: NW50
  • Exhaust: KF40
  • Motor: 3 Phase, 200-220/380-440/440-460V, 50/60Hz
  • Pumping speed: 141~300 CFM
  • Weight: 397 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Applications SEM • load lock • metal PVD • dielectric etch • ion implant • ashing • epitaxy • sputtering • clean gases & processes