831-462-8900
8:30am–5pm PST Mon–Fri
Provac Icon
Created with Sketch.
Provac Logo
SHOP BY BRAND
SHOP BY TYPE
PUMP REPAIR
a
831-462-8900
8:30am–5pm PST Mon–Fri
Provac
Shop
Rough Vacuum
Edwards EPX-180L Dry Pump
Edwards EPX-180L Dry Pump
Pricing and lead time confirmed with inquiry
Type of product
: dry pump
Manufacturer
: Edwards
Condition
: new
Price
: ASK
Inlet
: ISO63
Exhaust
: KF25
Pumping speed
: 106 CFM
Ultimate vacuum
: < 7 x 10-5 Torr
Weight
: 99 lbs
*Additional Configurations Available Upon Request
PROCEED WITH ORDER
MANUAL
TECHNICAL SHEET
Share
Technical Specs
Applications
semiconductor • ash/strip • implant end station applications