Edwards
Edwards EPX-180L Dry Pump
Pricing and lead time confirmed with inquiry
- Type of product: dry pump
- Manufacturer: Edwards
- Condition: new
- Price: ASK
- Inlet: ISO63
- Exhaust: KF25
- Pumping speed: 106 CFM
- Ultimate vacuum: < 7 x 10-5 Torr
- Weight: 99 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Applications | semiconductor • ash/strip • implant end station applications |
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