Edwards EPX-180L Dry Pump

Pricing and lead time confirmed with inquiry

  • Type of product: dry pump
  • Manufacturer: Edwards
  • Condition: new
  • Price: ASK
  • Inlet: ISO63
  • Exhaust: KF25
  • Pumping speed: 106 CFM
  • Ultimate vacuum: < 7 x 10-5 Torr
  • Weight: 99 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Applications semiconductor • ash/strip • implant end station applications