Edwards

Edwards EPX-180N Dry Pump, Rebuilt

$ 13,735.00

  • Type of product: dry pump
  • Manufacturer: Edwards
  • Condition: rebuilt
  • Price: $13,735.00
  • Inlet: ISO63
  • Exhaust: KF25
  • Pumping speed: 106 CFM
  • Ultimate vacuum: < 7 x 10-5 Torr
  • Weight: 104 lbs
  • *Additional Configurations Available Upon Request

Technical Specs

Applications semiconductor • ash/strip • implant end station applications
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